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000127088 1001_ $$0P:(DE-Juel1)128616$$aMoers, Jürgen$$b0$$eCorresponding author
000127088 1112_ $$aDPG-Spring Meeting$$cBerlin$$d2012-03-25 - 2012-03-30$$wGermany
000127088 245__ $$aMarker process for high overlay accuracy e-beam lithography
000127088 260__ $$c2012
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000127088 7001_ $$0P:(DE-Juel1)128856$$aTrellenkamp, Stefan$$b1
000127088 7001_ $$0P:(DE-HGF)0$$aRienks, Bert$$b2
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000127088 9141_ $$y2012
000127088 9201_ $$0I:(DE-Juel1)PGI-9-20110106$$kPGI-9$$lHalbleiter-Nanoelektronik$$x0
000127088 9201_ $$0I:(DE-82)080009_20140620$$kJARA-FIT$$lJülich-Aachen Research Alliance - Fundamentals of Future Information Technology$$x1
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