TY  - CONF
AU  - Moers, Jürgen
AU  - Trellenkamp, Stefan
AU  - Rienks, Bert
TI  - Marker process for high overlay accuracy e-beam lithography
M1  - FZJ-2012-00155
PY  - 2012
T2  - DPG-Spring Meeting
CY  - 25 Mar 2012 - 30 Mar 2012, Berlin (Germany)
Y2  - 25 Mar 2012 - 30 Mar 2012
M2  - Berlin, Germany
LB  - PUB:(DE-HGF)6
UR  - https://juser.fz-juelich.de/record/127088
ER  -