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@INPROCEEDINGS{Moers:127088,
      author       = {Moers, Jürgen and Trellenkamp, Stefan and Rienks, Bert},
      title        = {{M}arker process for high overlay accuracy e-beam
                      lithography},
      reportid     = {FZJ-2012-00155},
      year         = {2012},
      month         = {Mar},
      date          = {2012-03-25},
      organization  = {DPG-Spring Meeting, Berlin (Germany),
                       25 Mar 2012 - 30 Mar 2012},
      subtyp        = {Plenary/Keynote},
      cin          = {PGI-9 / JARA-FIT / PGI-8-PT},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$ /
                      I:(DE-Juel1)PGI-8-PT-20110228},
      pnm          = {42G - Peter Grünberg-Centre (PG-C) (POF2-42G41)},
      pid          = {G:(DE-HGF)POF2-42G41},
      typ          = {PUB:(DE-HGF)6},
      url          = {https://juser.fz-juelich.de/record/127088},
}