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001     127088
005     20210129210907.0
037 _ _ |a FZJ-2012-00155
100 1 _ |0 P:(DE-Juel1)128616
|a Moers, Jürgen
|b 0
|e Corresponding author
111 2 _ |a DPG-Spring Meeting
|c Berlin
|d 2012-03-25 - 2012-03-30
|w Germany
245 _ _ |a Marker process for high overlay accuracy e-beam lithography
260 _ _ |c 2012
336 7 _ |a Conference Presentation
|b conf
|m conf
|0 PUB:(DE-HGF)6
|s 1355403201_17141
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336 7 _ |a Conference Paper
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|2 EndNote
336 7 _ |a Other
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336 7 _ |a LECTURE_SPEECH
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336 7 _ |a conferenceObject
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336 7 _ |a INPROCEEDINGS
|2 BibTeX
536 _ _ |0 G:(DE-HGF)POF2-42G41
|a 42G - Peter Grünberg-Centre (PG-C) (POF2-42G41)
|c POF2-42G41
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700 1 _ |0 P:(DE-Juel1)128856
|a Trellenkamp, Stefan
|b 1
700 1 _ |0 P:(DE-HGF)0
|a Rienks, Bert
|b 2
909 C O |o oai:juser.fz-juelich.de:127088
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910 1 _ |0 I:(DE-588b)5008462-8
|6 P:(DE-Juel1)128616
|a Forschungszentrum Jülich GmbH
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910 1 _ |0 I:(DE-Juel1)PGI-8-PT-20110228
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914 1 _ |y 2012
920 1 _ |0 I:(DE-Juel1)PGI-9-20110106
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920 1 _ |0 I:(DE-82)080009_20140620
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|l Jülich-Aachen Research Alliance - Fundamentals of Future Information Technology
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920 1 _ |0 I:(DE-Juel1)PGI-8-PT-20110228
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980 _ _ |a conf
980 _ _ |a I:(DE-Juel1)PGI-8-PT-20110228
980 _ _ |a I:(DE-Juel1)PGI-9-20110106
980 _ _ |a I:(DE-82)080009_20140620
980 _ _ |a VDB
980 _ _ |a UNRESTRICTED
981 _ _ |a I:(DE-Juel1)PGI-8-PT-20110228
981 _ _ |a I:(DE-Juel1)VDB881

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