%0 Journal Article
%A Nichau, Alexander
%A Rubio-Zuazo, J.
%A Schnee, Michael
%A Castro, G. R.
%A Schubert, Jürgen
%A Mantl, Siegfried
%T Effective attenuation length for lanthanum lutetium oxide between 7 and 13 keV
%J Applied physics letters
%V 102
%N 3
%@ 0003-6951
%C Melville, NY
%I American Institute of Physics
%M FZJ-2013-01284
%P 031607 
%D 2013
%X To obtain quantitative depth information from hard X-ray photoemission spectroscopy, the effective attenuation length (EAL) is required. In this paper, the EAL was determined for LaLuO3 for electron kinetic energies between 7 and 13 keV. As a result, the EAL is in the range of 100–150A ° for the investigated photon energies. In addition, higher binding energy orbitals of La and Lu were measured and are discussed. LaLuO3 is a promising high-k dielectric for future nano-scaled MOS devices.
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000314032600028
%R 10.1063/1.4789524
%U https://juser.fz-juelich.de/record/132041