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000132041 1001_ $$0P:(DE-Juel1)128618$$aNichau, Alexander$$b0$$eCorresponding author
000132041 245__ $$aEffective attenuation length for lanthanum lutetium oxide between 7 and 13 keV
000132041 260__ $$aMelville, NY$$bAmerican Institute of Physics$$c2013
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000132041 520__ $$aTo obtain quantitative depth information from hard X-ray photoemission spectroscopy, the effective attenuation length (EAL) is required. In this paper, the EAL was determined for LaLuO3 for electron kinetic energies between 7 and 13 keV. As a result, the EAL is in the range of 100–150A ° for the investigated photon energies. In addition, higher binding energy orbitals of La and Lu were measured and are discussed. LaLuO3 is a promising high-k dielectric for future nano-scaled MOS devices.
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000132041 7001_ $$0P:(DE-HGF)0$$aRubio-Zuazo, J.$$b1
000132041 7001_ $$0P:(DE-Juel1)139578$$aSchnee, Michael$$b2
000132041 7001_ $$0P:(DE-HGF)0$$aCastro, G. R.$$b3
000132041 7001_ $$0P:(DE-Juel1)128631$$aSchubert, Jürgen$$b4
000132041 7001_ $$0P:(DE-Juel1)128609$$aMantl, Siegfried$$b5
000132041 773__ $$0PERI:(DE-600)1469436-0$$a10.1063/1.4789524$$gVol. 102, no. 3, p. 031607 -$$n3$$p031607 $$tApplied physics letters$$v102$$x0003-6951$$y2013
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