%0 Journal Article
%A Ding, Kaining
%A Aeberhard, Urs
%A Beyer, Wolfhard
%A Astakhov, Oleksandr
%A Köhler, Florian
%A Breuer, Uwe
%A Finger, Friedhelm
%A Carius, Reinhard
%A Rau, Uwe
%T Annealing induced defects in SiC, SiO x single layers, and SiC/SiO x hetero-superlattices
%J Physica status solidi / A
%V 209
%N 10
%@ 1862-6300
%C Weinheim
%I Wiley-VCH
%M FZJ-2013-01818
%P 1960 - 1964
%D 2012
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000310282000024
%R 10.1002/pssa.201200191
%U https://juser.fz-juelich.de/record/133281