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@MASTERSTHESIS{Bagdahn:133437,
      author       = {Bagdahn, Robert},
      title        = {{O}ptimierung der maschinellen {O}berflächenbehandlung von
                      {S}i und {S}i{G}e},
      school       = {FH Jülich-Aachen},
      type         = {BA},
      reportid     = {FZJ-2013-01885},
      pages        = {79 S.},
      year         = {2012},
      note         = {FH Jülich-Aachen, Bachelorarbeit, 2012},
      keywords     = {Unveröffentlichte Hochschulschrift (GND)},
      cin          = {PGI-9},
      cid          = {I:(DE-Juel1)PGI-9-20110106},
      pnm          = {421 - Frontiers of charge based Electronics (POF2-421)},
      pid          = {G:(DE-HGF)POF2-421},
      typ          = {PUB:(DE-HGF)2},
      url          = {https://juser.fz-juelich.de/record/133437},
}