Hauptseite > Publikationsdatenbank > Optimierung der maschinellen Oberflächenbehandlung von Si und SiGe > print |
001 | 133437 | ||
005 | 20210129211452.0 | ||
037 | _ | _ | |a FZJ-2013-01885 |
100 | 1 | _ | |a Bagdahn, Robert |0 P:(DE-HGF)0 |b 0 |e Corresponding author |
245 | _ | _ | |a Optimierung der maschinellen Oberflächenbehandlung von Si und SiGe |f 2012-08-27 |
260 | _ | _ | |c 2012 |
300 | _ | _ | |a 79 S. |
336 | 7 | _ | |a Bachelor Thesis |b bachelor |m bachelor |0 PUB:(DE-HGF)2 |s 1367831799_965 |2 PUB:(DE-HGF) |
336 | 7 | _ | |a Thesis |0 2 |2 EndNote |
336 | 7 | _ | |a bachelorThesis |2 DRIVER |
336 | 7 | _ | |a Output Types/Supervised Student Publication |2 DataCite |
336 | 7 | _ | |a SUPERVISED_STUDENT_PUBLICATION |2 ORCID |
336 | 7 | _ | |a MASTERSTHESIS |2 BibTeX |
502 | _ | _ | |a FH Jülich-Aachen, Bachelorarbeit, 2012 |c FH Jülich-Aachen |b BA |d 2012 |
536 | _ | _ | |a 421 - Frontiers of charge based Electronics (POF2-421) |0 G:(DE-HGF)POF2-421 |c POF2-421 |x 0 |f POF II |
650 | _ | 7 | |a Unveröffentlichte Hochschulschrift |x Bachelorarbeit |2 GND |0 V:(DE-588b)4276536-5 |
856 | 4 | _ | |u https://juser.fz-juelich.de/record/133437/files/FZJ-2013-01885.pdf |y Restricted |
909 | C | O | |o oai:juser.fz-juelich.de:133437 |p VDB |
910 | 1 | _ | |a Forschungszentrum Jülich GmbH |0 I:(DE-588b)5008462-8 |k FZJ |b 0 |6 P:(DE-HGF)0 |
910 | 1 | _ | |0 I:(DE-588b)5008462-8 |
910 | 1 | _ | |k FZJ |
910 | 1 | _ | |a Forschungszentrum Jülich GmbH |
910 | 1 | _ | |6 P:(DE-HGF)0 |
910 | 1 | _ | |b 0 |
913 | 1 | _ | |a DE-HGF |b Schlüsseltechnologien |1 G:(DE-HGF)POF2-420 |0 G:(DE-HGF)POF2-421 |2 G:(DE-HGF)POF2-400 |v Frontiers of charge based Electronics |x 0 |4 G:(DE-HGF)POF |3 G:(DE-HGF)POF2 |l Grundlagen zukünftiger Informationstechnologien |
914 | 1 | _ | |y 2012 |
920 | 1 | _ | |0 I:(DE-Juel1)PGI-9-20110106 |k PGI-9 |l Halbleiter-Nanoelektronik |x 0 |
980 | _ | _ | |a bachelor |
980 | _ | _ | |a VDB |
980 | _ | _ | |a UNRESTRICTED |
980 | _ | _ | |a I:(DE-Juel1)PGI-9-20110106 |
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