001     133437
005     20210129211452.0
037 _ _ |a FZJ-2013-01885
100 1 _ |a Bagdahn, Robert
|0 P:(DE-HGF)0
|b 0
|e Corresponding author
245 _ _ |a Optimierung der maschinellen Oberflächenbehandlung von Si und SiGe
|f 2012-08-27
260 _ _ |c 2012
300 _ _ |a 79 S.
336 7 _ |a Bachelor Thesis
|b bachelor
|m bachelor
|0 PUB:(DE-HGF)2
|s 1367831799_965
|2 PUB:(DE-HGF)
336 7 _ |a Thesis
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|2 EndNote
336 7 _ |a bachelorThesis
|2 DRIVER
336 7 _ |a Output Types/Supervised Student Publication
|2 DataCite
336 7 _ |a SUPERVISED_STUDENT_PUBLICATION
|2 ORCID
336 7 _ |a MASTERSTHESIS
|2 BibTeX
502 _ _ |a FH Jülich-Aachen, Bachelorarbeit, 2012
|c FH Jülich-Aachen
|b BA
|d 2012
536 _ _ |a 421 - Frontiers of charge based Electronics (POF2-421)
|0 G:(DE-HGF)POF2-421
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|x 0
|f POF II
650 _ 7 |a Unveröffentlichte Hochschulschrift
|x Bachelorarbeit
|2 GND
|0 V:(DE-588b)4276536-5
856 4 _ |u https://juser.fz-juelich.de/record/133437/files/FZJ-2013-01885.pdf
|y Restricted
909 C O |o oai:juser.fz-juelich.de:133437
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910 1 _ |a Forschungszentrum Jülich GmbH
|0 I:(DE-588b)5008462-8
|k FZJ
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910 1 _ |0 I:(DE-588b)5008462-8
910 1 _ |k FZJ
910 1 _ |a Forschungszentrum Jülich GmbH
910 1 _ |6 P:(DE-HGF)0
910 1 _ |b 0
913 1 _ |a DE-HGF
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|v Frontiers of charge based Electronics
|x 0
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|l Grundlagen zukünftiger Informationstechnologien
914 1 _ |y 2012
920 1 _ |0 I:(DE-Juel1)PGI-9-20110106
|k PGI-9
|l Halbleiter-Nanoelektronik
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980 _ _ |a bachelor
980 _ _ |a VDB
980 _ _ |a UNRESTRICTED
980 _ _ |a I:(DE-Juel1)PGI-9-20110106


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