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@ARTICLE{Pavunny:134316,
author = {Pavunny, S. P. and Misra, P. and Thomas, R. and Kumar, A.
and Schubert, Jürgen and Scott, J. F. and Katiyar, R. S.},
title = {{A}dvanced high-k gate dielectric amorphous {L}a{G}d{O}3
gated metal-oxide-semiconductor devices with sub-nanometer
equivalent oxide thickness},
journal = {Applied physics letters},
volume = {102},
number = {19},
address = {Melville, NY},
publisher = {American Institute of Physics},
reportid = {FZJ-2013-02543},
pages = {192904 -},
year = {2013},
abstract = {Careful selection of pulsed laser deposition conditions was
executed to achieve sub-nanometer EOT (equivalent oxide
thickness) in amorphous LaGdO3 based high-k/metal gate
stacks. The lowest EOTs attained were ∼5.4 Å and
8.4 Å with and without quantum mechanical correction,
respectively. The electrical measurements yielded a high
permittivity of 20.5 ± 2.4, a thin bottom interfacial
layer of thickness 4.5 ± 1 Å, and interface
(cm−2 eV−1) and fixed (cm−2) charge densities of
∼1012. Analysis of temperature dependent leakage currents
revealed that gate injection current was dominated by
Schottky emission below 1.2 MV/cm and quantum mechanical
tunneling above this field. The physical origin of substrate
injection was found to be a combination of Schottky emission
and trap assisted tunneling.},
cin = {PGI-9 / JARA-FIT},
ddc = {530},
cid = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
pnm = {421 - Frontiers of charge based Electronics (POF2-421)},
pid = {G:(DE-HGF)POF2-421},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000320440800071},
doi = {10.1063/1.4805037},
url = {https://juser.fz-juelich.de/record/134316},
}