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001 | 139336 | ||
005 | 20210129212544.0 | ||
024 | 7 | _ | |a 10.1088/0268-1242/28/8/085006 |2 doi |
024 | 7 | _ | |a 0268-1242 |2 ISSN |
024 | 7 | _ | |a 1361-6641 |2 ISSN |
024 | 7 | _ | |a WOS:000321701100009 |2 WOS |
037 | _ | _ | |a FZJ-2013-05333 |
082 | _ | _ | |a 530 |
100 | 1 | _ | |a Witte, W |0 P:(DE-HGF)0 |b 0 |e Corresponding author |
245 | _ | _ | |a AlGaN/GaN heterostructure field-effect transistors regrown on nitrogen implanted templates |
260 | _ | _ | |a Bristol |c 2013 |b IOP Publ. |
336 | 7 | _ | |a Journal Article |b journal |m journal |0 PUB:(DE-HGF)16 |s 1385641332_8527 |2 PUB:(DE-HGF) |
336 | 7 | _ | |a Output Types/Journal article |2 DataCite |
336 | 7 | _ | |a Journal Article |0 0 |2 EndNote |
336 | 7 | _ | |a ARTICLE |2 BibTeX |
336 | 7 | _ | |a JOURNAL_ARTICLE |2 ORCID |
336 | 7 | _ | |a article |2 DRIVER |
500 | _ | _ | |3 POF3_Assignment on 2016-02-29 |
520 | _ | _ | |a We demonstrate the application of nitrogen (N) implantation in GaN as a current-blocking layer. In a first step, vertical current-blocking behavior was confirmed by processing quasi-vertical Schottky diodes with full-area N-implantation. The leakage current was only 10−6 A cm−2 in forward and reverse directions. Also, the regrowth of AlGaN/GaN heterostructure field-effect transistors on N-implanted and, for reference, non-implanted GaN templates is demonstrated. Even though a decrease in the mobility and sheet carrier density of the two-dimensional electron gas was observed, excellent off-state properties were achieved. Regrown devices exhibited leakage currents as low as 10−7 mA mm−1, showing very good quality of the regrowth interface. However, a detailed analysis with pulsed I–V and C–V measurements suggest an increased presence of traps due to regrowth, especially on N-implanted templates. |
536 | _ | _ | |a 421 - Frontiers of charge based Electronics (POF2-421) |0 G:(DE-HGF)POF2-421 |c POF2-421 |x 0 |f POF II |
588 | _ | _ | |a Dataset connected to CrossRef, juser.fz-juelich.de |
700 | 1 | _ | |a Reuters, B |0 P:(DE-HGF)0 |b 1 |
700 | 1 | _ | |a Fahle, D |0 P:(DE-HGF)0 |b 2 |
700 | 1 | _ | |a Behmenburg, H |0 P:(DE-HGF)0 |b 3 |
700 | 1 | _ | |a Wang, K R |0 P:(DE-HGF)0 |b 4 |
700 | 1 | _ | |a Trampert, A |0 P:(DE-HGF)0 |b 5 |
700 | 1 | _ | |a Holländer, B |0 P:(DE-Juel1)125595 |b 6 |u fzj |
700 | 1 | _ | |a Hahn, H |0 P:(DE-HGF)0 |b 7 |
700 | 1 | _ | |a Kalisch, H |0 P:(DE-HGF)0 |b 8 |
700 | 1 | _ | |a Heuken, M |0 P:(DE-HGF)0 |b 9 |
700 | 1 | _ | |a Vescan, A |0 P:(DE-HGF)0 |b 10 |
773 | _ | _ | |a 10.1088/0268-1242/28/8/085006 |g Vol. 28, no. 8, p. 085006 - |p 085006 - |n 8 |0 PERI:(DE-600)1361285-2 |t Semiconductor science and technology |v 28 |y 2013 |x 1361-6641 |
856 | 4 | _ | |u https://juser.fz-juelich.de/record/139336/files/FZJ-2013-05333_PV.pdf |z Published final document. |y Restricted |
909 | C | O | |o oai:juser.fz-juelich.de:139336 |p VDB |
910 | 1 | _ | |a Forschungszentrum Jülich GmbH |0 I:(DE-588b)5008462-8 |k FZJ |b 6 |6 P:(DE-Juel1)125595 |
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