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| 001 | 139338 | ||
| 005 | 20240619083454.0 | ||
| 024 | 7 | _ | |a 10.1016/j.nimb.2012.11.088 |2 doi |
| 024 | 7 | _ | |a 0168-583X |2 ISSN |
| 024 | 7 | _ | |a 1872-9584 |2 ISSN |
| 024 | 7 | _ | |a 0168-583x |2 ISSN |
| 024 | 7 | _ | |a WOS:000321722200091 |2 WOS |
| 037 | _ | _ | |a FZJ-2013-05335 |
| 082 | _ | _ | |a 530 |
| 100 | 1 | _ | |a Zhang, B. |0 P:(DE-Juel1)151345 |b 0 |e Corresponding author |
| 245 | _ | _ | |a Effects of C+ ion implantation on electrical properties of NiSiGe/SiGe contacts |
| 260 | _ | _ | |a Amsterdam [u.a.] |c 2013 |b Elsevier |
| 336 | 7 | _ | |a Journal Article |b journal |m journal |0 PUB:(DE-HGF)16 |s 1385646243_8169 |2 PUB:(DE-HGF) |
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| 336 | 7 | _ | |a article |2 DRIVER |
| 500 | _ | _ | |3 POF3_Assignment on 2016-02-29 |
| 520 | _ | _ | |a We have investigated the morphology and electrical properties of NiSiGe/SiGe contact by C+ ions pre-implanted into relaxed Si0.8Ge0.2 layers. Cross-section transmission electron microscopy revealed that both the surface and interface of NiSiGe were improved by C+ ions implantation. In addition, the effective hole Schottky barrier heights (ΦBp) of NiSiGe/SiGe were extracted. ΦBp was observed to decrease substantially with an increase in C+ ion implantation dose. |
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| 700 | 1 | _ | |a Yu, W. |0 P:(DE-HGF)0 |b 1 |
| 700 | 1 | _ | |a Zhao, Q. T. |0 P:(DE-Juel1)128649 |b 2 |
| 700 | 1 | _ | |a Buca, D. |0 P:(DE-Juel1)125569 |b 3 |
| 700 | 1 | _ | |a Breuer, Uwe |0 P:(DE-Juel1)133840 |b 4 |
| 700 | 1 | _ | |a Hartmann, J. -M. |0 P:(DE-HGF)0 |b 5 |
| 700 | 1 | _ | |a Holländer, B. |0 P:(DE-Juel1)125595 |b 6 |
| 700 | 1 | _ | |a Mantl, S. |0 P:(DE-Juel1)128609 |b 7 |
| 700 | 1 | _ | |a Zhang, M. |0 P:(DE-HGF)0 |b 8 |
| 700 | 1 | _ | |a Wang, X. |0 P:(DE-HGF)0 |b 9 |
| 773 | _ | _ | |a 10.1016/j.nimb.2012.11.088 |g Vol. 307, p. 408 - 411 |p 408 - 411 |0 PERI:(DE-600)1466524-4 |t Nuclear instruments & methods in physics research / B |v 307 |y 2013 |x 0168-583X |
| 856 | 4 | _ | |u https://juser.fz-juelich.de/record/139338/files/FZJ-2013-05335_PV.pdf |z Published final document. |y Restricted |
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