000139635 001__ 139635
000139635 005__ 20240610120001.0
000139635 037__ $$aFZJ-2013-05613
000139635 041__ $$aEnglish
000139635 1001_ $$0P:(DE-Juel1)128618$$aNichau, Alexander$$b0$$eCorresponding author$$ufzj
000139635 1112_ $$a18th Conference on 'Insulating Films on Semiconductors'$$cKrakau$$d2013-06-25 - 2013-06-28$$gINFOS2013$$wPolen
000139635 245__ $$aReduction of silicon dioxide interfacial layer to 4.6 A EOT by Al remote scavenging in high-k/metal gate stacks on Si
000139635 260__ $$c2013
000139635 3367_ $$0PUB:(DE-HGF)6$$2PUB:(DE-HGF)$$aConference Presentation$$bconf$$mconf$$s1385632971_8169$$xOther
000139635 3367_ $$033$$2EndNote$$aConference Paper
000139635 3367_ $$2DataCite$$aOther
000139635 3367_ $$2ORCID$$aLECTURE_SPEECH
000139635 3367_ $$2DRIVER$$aconferenceObject
000139635 3367_ $$2BibTeX$$aINPROCEEDINGS
000139635 502__ $$cRWTH Aachen
000139635 536__ $$0G:(DE-HGF)POF2-421$$a421 - Frontiers of charge based Electronics (POF2-421)$$cPOF2-421$$fPOF II$$x0
000139635 7001_ $$0P:(DE-Juel1)144017$$aSchäfer, Anna$$b1$$ufzj
000139635 7001_ $$0P:(DE-Juel1)162211$$aKnoll, Lars$$b2$$ufzj
000139635 7001_ $$0P:(DE-Juel1)138778$$aWirths, Stephan$$b3$$ufzj
000139635 7001_ $$0P:(DE-HGF)0$$aSchram, T.$$b4
000139635 7001_ $$0P:(DE-HGF)0$$aRagnarsson, L. -A.$$b5
000139635 7001_ $$0P:(DE-Juel1)128631$$aSchubert, Jürgen$$b6$$ufzj
000139635 7001_ $$0P:(DE-Juel1)138772$$aBernardy, Patric$$b7$$ufzj
000139635 7001_ $$0P:(DE-Juel1)130811$$aLuysberg, Martina$$b8$$ufzj
000139635 7001_ $$0P:(DE-Juel1)133839$$aBesmehn, Astrid$$b9$$ufzj
000139635 7001_ $$0P:(DE-Juel1)133840$$aBreuer, Uwe$$b10$$ufzj
000139635 7001_ $$0P:(DE-Juel1)125569$$aBuca, Dan Mihai$$b11$$ufzj
000139635 7001_ $$0P:(DE-Juel1)128609$$aMantl, Siegfried$$b12$$ufzj
000139635 909CO $$ooai:juser.fz-juelich.de:139635$$pVDB
000139635 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)128618$$aForschungszentrum Jülich GmbH$$b0$$kFZJ
000139635 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)144017$$aForschungszentrum Jülich GmbH$$b1$$kFZJ
000139635 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)162211$$aForschungszentrum Jülich GmbH$$b2$$kFZJ
000139635 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)138778$$aForschungszentrum Jülich GmbH$$b3$$kFZJ
000139635 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)128631$$aForschungszentrum Jülich GmbH$$b6$$kFZJ
000139635 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)138772$$aForschungszentrum Jülich GmbH$$b7$$kFZJ
000139635 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130811$$aForschungszentrum Jülich GmbH$$b8$$kFZJ
000139635 9101_ $$0I:(DE-Juel1)ZEA-3-20090406$$6P:(DE-Juel1)133839$$aAnalytik$$b9$$kZEA-3
000139635 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)133839$$aForschungszentrum Jülich GmbH$$b9$$kFZJ
000139635 9101_ $$0I:(DE-Juel1)ZEA-3-20090406$$6P:(DE-Juel1)133840$$aAnalytik$$b10$$kZEA-3
000139635 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)133840$$aForschungszentrum Jülich GmbH$$b10$$kFZJ
000139635 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)125569$$aForschungszentrum Jülich GmbH$$b11$$kFZJ
000139635 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)128609$$aForschungszentrum Jülich GmbH$$b12$$kFZJ
000139635 9131_ $$0G:(DE-HGF)POF2-421$$1G:(DE-HGF)POF2-420$$2G:(DE-HGF)POF2-400$$3G:(DE-HGF)POF2$$4G:(DE-HGF)POF$$aDE-HGF$$bSchlüsseltechnologien$$lGrundlagen zukünftiger Informationstechnologien$$vFrontiers of charge based Electronics$$x0
000139635 9141_ $$y2013
000139635 920__ $$lyes
000139635 9201_ $$0I:(DE-Juel1)PGI-9-20110106$$kPGI-9$$lHalbleiter-Nanoelektronik$$x0
000139635 9201_ $$0I:(DE-82)080009_20140620$$kJARA-FIT$$lJülich-Aachen Research Alliance - Fundamentals of Future Information Technology$$x1
000139635 9201_ $$0I:(DE-Juel1)ZEA-3-20090406$$kZEA-3$$lAnalytik$$x2
000139635 9201_ $$0I:(DE-Juel1)PGI-5-20110106$$kPGI-5$$lMikrostrukturforschung$$x3
000139635 980__ $$aconf
000139635 980__ $$aVDB
000139635 980__ $$aUNRESTRICTED
000139635 980__ $$aI:(DE-Juel1)PGI-9-20110106
000139635 980__ $$aI:(DE-Juel1)VDB881
000139635 980__ $$aI:(DE-Juel1)ZEA-3-20090406
000139635 980__ $$aI:(DE-Juel1)PGI-5-20110106
000139635 981__ $$aI:(DE-Juel1)ER-C-1-20170209
000139635 981__ $$aI:(DE-Juel1)VDB881
000139635 981__ $$aI:(DE-Juel1)ZEA-3-20090406
000139635 981__ $$aI:(DE-Juel1)PGI-5-20110106