TY  - JOUR
AU  - Rosezin, R.
AU  - Meier, M.
AU  - Trellenkamp, S.
AU  - Kügeler, C.
AU  - Waser, R.
TI  - Observation of unipolar resistance switching in silver doped methyl-silsesquioxane
JO  - Microelectronic engineering
VL  - 87
SN  - 0167-9317
CY  - [S.l.] @
PB  - Elsevier
M1  - PreJuSER-14009
PY  - 2010
N1  - Record converted from VDB: 12.11.2012
AB  - Resistive switching materials attract high scientific interest as a candidate for potential next-generation non-volatile memories. Nano crossbar structures and single junctions down to 60 x 60 nm(2) with integrated silver doped methyl-silsesquioxane (MSQ) as switching material are fabricated using UV nano imprint. Here silver doped MSQ with platinum top and bottom electrodes replaces the formerly used material stack with undoped MSQ between platinum bottom and silver top electrodes. The new material system yields advantages regarding the process temperature budget and therefore multiple crossbar arrays and electrode layers are possible in order to multiply the integration density by the number of crossbar layers. (C) 2009 Elsevier B.V. All rights reserved.
KW  - J (WoSType)
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000276300700216
DO  - DOI:10.1016/j.mee.2009.11.034
UR  - https://juser.fz-juelich.de/record/14009
ER  -