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@ARTICLE{Rosezin:14009,
author = {Rosezin, R. and Meier, M. and Trellenkamp, S. and Kügeler,
C. and Waser, R.},
title = {{O}bservation of unipolar resistance switching in silver
doped methyl-silsesquioxane},
journal = {Microelectronic engineering},
volume = {87},
issn = {0167-9317},
address = {[S.l.] @},
publisher = {Elsevier},
reportid = {PreJuSER-14009},
year = {2010},
note = {Record converted from VDB: 12.11.2012},
abstract = {Resistive switching materials attract high scientific
interest as a candidate for potential next-generation
non-volatile memories. Nano crossbar structures and single
junctions down to 60 x 60 nm(2) with integrated silver doped
methyl-silsesquioxane (MSQ) as switching material are
fabricated using UV nano imprint. Here silver doped MSQ with
platinum top and bottom electrodes replaces the formerly
used material stack with undoped MSQ between platinum bottom
and silver top electrodes. The new material system yields
advantages regarding the process temperature budget and
therefore multiple crossbar arrays and electrode layers are
possible in order to multiply the integration density by the
number of crossbar layers. (C) 2009 Elsevier B.V. All rights
reserved.},
keywords = {J (WoSType)},
cin = {IFF-6 / JARA-FIT / IBN-PT},
ddc = {620},
cid = {I:(DE-Juel1)VDB786 / $I:(DE-82)080009_20140620$ /
I:(DE-Juel1)VDB554},
pnm = {Grundlagen für zukünftige Informationstechnologien},
pid = {G:(DE-Juel1)FUEK412},
shelfmark = {Engineering, Electrical $\&$ Electronic / Nanoscience $\&$
Nanotechnology / Optics / Physics, Applied},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000276300700216},
doi = {10.1016/j.mee.2009.11.034},
url = {https://juser.fz-juelich.de/record/14009},
}