TY  - JOUR
AU  - Durgun Özben, E.
AU  - Lopes, J.M.J.
AU  - Nichau, A.
AU  - Lupták, R.
AU  - Lenk, S.
AU  - Besmehn, A.
AU  - Bourdelle, K.K.
AU  - Zhao, Q.T.
AU  - Schubert, J.
AU  - Mantl, S.
TI  - Rare-earth oxide/TiN gate stacks on high mobility strained silicon on insulator for fully depleted metal-oxide-semiconductor field-effect transistors
JO  - Journal of vacuum science & technology / B
VL  - 29
SN  - 0734-211X
CY  - New York, NY
PB  - Inst.
M1  - PreJuSER-14123
SP  - 01A903
PY  - 2011
N1  - This work was partially supported by the project KZWEI, funded in line with the technology funding for regional development (ERDF) of the European Union and by funds of the Free State of Saxony and the European Network of Excellence Nanosil (FP7 Grant No. 216171).
AB  - We demonstrate the integration of TbScO3, LaScO3, and LaLuO3 as alternative gate oxides for fully depleted silicon on insulator (SOI) and strained SOI metal-oxide-semiconductor field-effect transistors (MOSFETs) with equivalent oxide thicknesses of 2.8, 2.4, and 1.55 nm, respectively. Silicate formation at the high-kappa/Si interface was studied by x-ray photoelectron spectroscopy. Electrical investigations revealed good transistor performance with these novel gate oxides with permittivities in the range of 26-32 and TiN as a metal gate. Steep inverse subthreshold slopes of 72 mV/dec, high I-on/I-off ratios over 10(8), and a low density of interface states of approximate to 5 X 1011 (eV cm(2))(-1) were achieved. MOSFETs on SOI substrates show good low field electron mobilities of 180, 183, and 188 cm(2)/V s for all investigated oxides. For devices on strained SOI the electron mobility was improved by a factor of 2. The measured mobilities are close to those of devices with HfO2 as gate dielectric, while offering better electrostatic control due to their higher permittivities. (c) 2011 American Vacuum Society. [DOI: 10.1116/1.3533760]
KW  - J (WoSType)
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000286679400059
DO  - DOI:10.1116/1.3533760
UR  - https://juser.fz-juelich.de/record/14123
ER  -