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@INPROCEEDINGS{Hardtdegen:150545,
      author       = {Hardtdegen, Hilde and Winden, Andreas and Fox, Alfred and
                      Haab, Anna and Grützmacher, Detlev and Kordos, Peter and
                      Gregusova, Dagmar and Maros, Michel and Mikulics, Martin},
      title        = {{M}icro-{PL} for {MOVPE} grown {A}l{G}a{N}/{G}a{N} {HFET}
                      structure optimization},
      reportid     = {FZJ-2014-00599},
      isbn         = {978-3-89336-870-9},
      pages        = {59 - 62},
      year         = {2013},
      abstract     = {Micro-photoluminescence (μ-PL) studies were performed on
                      AlGaN/GaN heterostructure field effect transistor (HFET)
                      structures with different gate recessing depths. It was
                      found that μ-PL is the method of choice for detecting
                      strain in the lateral resolution relevant for HFET device
                      length scales and therefore useful for structure
                      optimization. Strain is partially relaxed and non-uniform
                      after recessing. The PL-results elucidate the device
                      characteristics and partially explain the reduced charge
                      density observed.},
      month         = {Jun},
      date          = {2013-06-02},
      organization  = {15th European Workshop on Metalorganic
                       Vapour Phase Epitaxie, Aachen
                       (Germany), 2 Jun 2013 - 5 Jun 2013},
      cin          = {PGI-9},
      cid          = {I:(DE-Juel1)PGI-9-20110106},
      pnm          = {423 - Sensorics and bioinspired systems (POF2-423)},
      pid          = {G:(DE-HGF)POF2-423},
      typ          = {PUB:(DE-HGF)8},
      url          = {https://juser.fz-juelich.de/record/150545},
}