001     150545
005     20210129213216.0
020 _ _ |a 978-3-89336-870-9
037 _ _ |a FZJ-2014-00599
041 _ _ |a English
100 1 _ |a Hardtdegen, Hilde
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111 2 _ |a 15th European Workshop on Metalorganic Vapour Phase Epitaxie
|w Germany
|c Aachen
|d 2013-06-02 - 2013-06-05
|g EWMOVPE XV
245 _ _ |a Micro-PL for MOVPE grown AlGaN/GaN HFET structure optimization
260 _ _ |c 2013
300 _ _ |a 59 - 62
336 7 _ |a Contribution to a conference proceedings
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336 7 _ |a Conference Paper
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336 7 _ |a CONFERENCE_PAPER
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336 7 _ |a Output Types/Conference Paper
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336 7 _ |a conferenceObject
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336 7 _ |a INPROCEEDINGS
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500 _ _ |3 POF3_Assignment on 2016-02-29
520 _ _ |a Micro-photoluminescence (μ-PL) studies were performed on AlGaN/GaN heterostructure field effect transistor (HFET) structures with different gate recessing depths. It was found that μ-PL is the method of choice for detecting strain in the lateral resolution relevant for HFET device length scales and therefore useful for structure optimization. Strain is partially relaxed and non-uniform after recessing. The PL-results elucidate the device characteristics and partially explain the reduced charge density observed.
536 _ _ |a 423 - Sensorics and bioinspired systems (POF2-423)
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700 1 _ |a Winden, Andreas
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700 1 _ |a Fox, Alfred
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700 1 _ |a Haab, Anna
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700 1 _ |a Grützmacher, Detlev
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700 1 _ |a Kordos, Peter
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700 1 _ |a Gregusova, Dagmar
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700 1 _ |a Maros, Michel
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700 1 _ |a Mikulics, Martin
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909 C O |o oai:juser.fz-juelich.de:150545
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910 1 _ |a Forschungszentrum Jülich GmbH
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913 2 _ |a DE-HGF
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|v Sensorics and bioinspired systems
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914 1 _ |y 2013
920 _ _ |l yes
920 1 _ |0 I:(DE-Juel1)PGI-9-20110106
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