%0 Journal Article
%A Iken, H.
%A Ahlborn, K.
%A Gerlach, F.
%A Vonau, W.
%A Zander, W.
%A Schubert, J.
%A Schöning, M. J.
%T Development of redox glasses and subsequent processing by means of pulsed laser deposition for realizing silicon-based thin-film sensors.
%J Electrochimica acta
%V 113
%@ 0013-4686
%C New York, NY [u.a.]
%I Elsevier
%M FZJ-2014-00644
%P 762 - 767
%D 2013
%X In this work, two different redox-sensitive glass materials have been fabricated for the development of a production friendly redox electrode. The specific glass targets have been prepared by glass pouring process. The transducer structure is fabricated via conventional silicon-based semiconductor technology. The glass bulk material was deposited for the first time by means of pulsed laser deposition process into the thin-film state on the sensor structures. The fabricated sensors have been physically and electrochemically characterized by X-ray photoelectron spectroscopy, determination of expansion coefficient, impedance and potentiometric measurements.
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000330491500096
%R 10.1016/j.electacta.2013.08.092
%U https://juser.fz-juelich.de/record/150595