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| Home > Publications database > Development of redox glasses and subsequent processing by means of pulsed laser deposition for realizing silicon-based thin-film sensors. |
| Home > Publications database > Development of redox glasses and subsequent processing by means of pulsed laser deposition for realizing silicon-based thin-film sensors. |
| Journal Article | FZJ-2014-00644 |
; ; ; ; ; ;
2013
Elsevier
New York, NY [u.a.]
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Please use a persistent id in citations: doi:10.1016/j.electacta.2013.08.092
Abstract: In this work, two different redox-sensitive glass materials have been fabricated for the development of a production friendly redox electrode. The specific glass targets have been prepared by glass pouring process. The transducer structure is fabricated via conventional silicon-based semiconductor technology. The glass bulk material was deposited for the first time by means of pulsed laser deposition process into the thin-film state on the sensor structures. The fabricated sensors have been physically and electrochemically characterized by X-ray photoelectron spectroscopy, determination of expansion coefficient, impedance and potentiometric measurements.
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