TY  - JOUR
AU  - Iken, H.
AU  - Ahlborn, K.
AU  - Gerlach, F.
AU  - Vonau, W.
AU  - Zander, W.
AU  - Schubert, J.
AU  - Schöning, M. J.
TI  - Development of redox glasses and subsequent processing by means of pulsed laser deposition for realizing silicon-based thin-film sensors.
JO  - Electrochimica acta
VL  - 113
SN  - 0013-4686
CY  - New York, NY [u.a.]
PB  - Elsevier
M1  - FZJ-2014-00644
SP  - 762 - 767
PY  - 2013
AB  - In this work, two different redox-sensitive glass materials have been fabricated for the development of a production friendly redox electrode. The specific glass targets have been prepared by glass pouring process. The transducer structure is fabricated via conventional silicon-based semiconductor technology. The glass bulk material was deposited for the first time by means of pulsed laser deposition process into the thin-film state on the sensor structures. The fabricated sensors have been physically and electrochemically characterized by X-ray photoelectron spectroscopy, determination of expansion coefficient, impedance and potentiometric measurements.
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000330491500096
DO  - DOI:10.1016/j.electacta.2013.08.092
UR  - https://juser.fz-juelich.de/record/150595
ER  -