%0 Journal Article
%A Reiners, Marcel
%A Xu, Ke
%A Aslam, Nabeel
%A Devi, Anjana
%A Hoffmann-Eifert, Susanne
%A Waser, R.
%T Growth and Crystallization of TiO 2 Thin Films by Atomic Layer Deposition Using a Novel Amido Guanidinate Titanium Source and Tetrakis-dimethylamido-titanium
%J Chemistry of materials
%V 25
%N 15
%@ 1520-5002
%C Washington, DC
%I American Chemical Society
%M FZJ-2014-00991
%P 2934 - 2943
%D 2013
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000323193000005
%R 10.1021/cm303703r
%U https://juser.fz-juelich.de/record/150958