Journal Article

FZJ-2014-00991

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Growth and Crystallization of TiO 2 Thin Films by Atomic Layer Deposition Using a Novel Amido Guanidinate Titanium Source and Tetrakis-dimethylamido-titanium

Reiners, M. (Corresponding author) ; Xu, K. ; Aslam, N.FZJ* ; Devi, A. ; Hoffmann-Eifert, S.FZJ* ; Waser, R.FZJ*

2013
American Chemical Society Washington, DC

This record in other databases:    

Please use a persistent id in citations: doi:10.1021/cm303703r

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Contributing Institute(s):

1. Elektronische Materialien (PGI-7)

Research Program(s):

1. 424 - Exploratory materials and phenomena (POF2-424) (POF2-424)

Appears in the scientific report 2013

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Database coverage:
; BIOSIS Previews ; Current Contents - Physical, Chemical and Earth Sciences ; JCR ; Nationallizenz ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

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