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000150958 1001_ $$0P:(DE-Juel1)138879$$aReiners, Marcel$$b0$$eCorresponding author
000150958 245__ $$aGrowth and Crystallization of TiO 2 Thin Films by Atomic Layer Deposition Using a Novel Amido Guanidinate Titanium Source and Tetrakis-dimethylamido-titanium
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000150958 7001_ $$0P:(DE-Juel1)130717$$aHoffmann-Eifert, Susanne$$b4$$ufzj
000150958 7001_ $$0P:(DE-Juel1)131022$$aWaser, R.$$b5
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