TY  - JOUR
AU  - Reiners, Marcel
AU  - Xu, Ke
AU  - Aslam, Nabeel
AU  - Devi, Anjana
AU  - Hoffmann-Eifert, Susanne
AU  - Waser, R.
TI  - Growth and Crystallization of TiO 2 Thin Films by Atomic Layer Deposition Using a Novel Amido Guanidinate Titanium Source and Tetrakis-dimethylamido-titanium
JO  - Chemistry of materials
VL  - 25
IS  - 15
SN  - 1520-5002
CY  - Washington, DC
PB  - American Chemical Society
M1  - FZJ-2014-00991
SP  - 2934 - 2943
PY  - 2013
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000323193000005
DO  - DOI:10.1021/cm303703r
UR  - https://juser.fz-juelich.de/record/150958
ER  -