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@ARTICLE{Reiners:150958,
      author       = {Reiners, Marcel and Xu, Ke and Aslam, Nabeel and Devi,
                      Anjana and Hoffmann-Eifert, Susanne and Waser, R.},
      title        = {{G}rowth and {C}rystallization of {T}i{O} 2 {T}hin {F}ilms
                      by {A}tomic {L}ayer {D}eposition {U}sing a {N}ovel {A}mido
                      {G}uanidinate {T}itanium {S}ource and
                      {T}etrakis-dimethylamido-titanium},
      journal      = {Chemistry of materials},
      volume       = {25},
      number       = {15},
      issn         = {1520-5002},
      address      = {Washington, DC},
      publisher    = {American Chemical Society},
      reportid     = {FZJ-2014-00991},
      pages        = {2934 - 2943},
      year         = {2013},
      cin          = {PGI-7},
      ddc          = {540},
      cid          = {I:(DE-Juel1)PGI-7-20110106},
      pnm          = {424 - Exploratory materials and phenomena (POF2-424)},
      pid          = {G:(DE-HGF)POF2-424},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000323193000005},
      doi          = {10.1021/cm303703r},
      url          = {https://juser.fz-juelich.de/record/150958},
}