Hauptseite > Publikationsdatenbank > Growth and Crystallization of TiO 2 Thin Films by Atomic Layer Deposition Using a Novel Amido Guanidinate Titanium Source and Tetrakis-dimethylamido-titanium > print

001     150958
005     20210129213338.0
024 7 _ |a 10.1021/cm303703r
|2 doi
024 7 _ |a 0897-4756
|2 ISSN
024 7 _ |a 1520-5002
|2 ISSN
024 7 _ |a WOS:000323193000005
|2 WOS
024 7 _ |a altmetric:1749024
|2 altmetric
037 _ _ |a FZJ-2014-00991
082 _ _ |a 540
100 1 _ |a Reiners, Marcel
|0 P:(DE-Juel1)138879
|b 0
|e Corresponding author
245 _ _ |a Growth and Crystallization of TiO 2 Thin Films by Atomic Layer Deposition Using a Novel Amido Guanidinate Titanium Source and Tetrakis-dimethylamido-titanium
260 _ _ |a Washington, DC
|c 2013
|b American Chemical Society
336 7 _ |a Journal Article
|b journal
|m journal
|0 PUB:(DE-HGF)16
|s 1391088745_27177
|2 PUB:(DE-HGF)
336 7 _ |a Output Types/Journal article
|2 DataCite
336 7 _ |a Journal Article
|0 0
|2 EndNote
336 7 _ |a ARTICLE
|2 BibTeX
336 7 _ |a JOURNAL_ARTICLE
|2 ORCID
336 7 _ |a article
|2 DRIVER
500 _ _ |3 POF3_Assignment on 2016-02-29
536 _ _ |a 424 - Exploratory materials and phenomena (POF2-424)
|0 G:(DE-HGF)POF2-424
|c POF2-424
|x 0
|f POF II
588 _ _ |a Dataset connected to CrossRef, juser.fz-juelich.de
700 1 _ |a Xu, Ke
|0 P:(DE-HGF)0
|b 1
700 1 _ |a Aslam, Nabeel
|0 P:(DE-Juel1)140489
|b 2
700 1 _ |a Devi, Anjana
|0 P:(DE-HGF)0
|b 3
700 1 _ |a Hoffmann-Eifert, Susanne
|0 P:(DE-Juel1)130717
|b 4
|u fzj
700 1 _ |a Waser, R.
|0 P:(DE-Juel1)131022
|b 5
773 _ _ |a 10.1021/cm303703r
|g Vol. 25, no. 15, p. 2934 - 2943
|p 2934 - 2943
|n 15
|0 PERI:(DE-600)1500399-1
|t Chemistry of materials
|v 25
|y 2013
|x 1520-5002
856 4 _ |u https://juser.fz-juelich.de/record/150958/files/FZJ-2014-00991.pdf
|z Published final document.
|y Restricted
909 C O |o oai:juser.fz-juelich.de:150958
|p VDB
910 1 _ |a Forschungszentrum Jülich GmbH
|0 I:(DE-588b)5008462-8
|k FZJ
|b 2
|6 P:(DE-Juel1)140489
910 1 _ |a Forschungszentrum Jülich GmbH
|0 I:(DE-588b)5008462-8
|k FZJ
|b 4
|6 P:(DE-Juel1)130717
910 1 _ |a Forschungszentrum Jülich GmbH
|0 I:(DE-588b)5008462-8
|k FZJ
|b 5
|6 P:(DE-Juel1)131022
913 2 _ |a DE-HGF
|b Key Technologies
|l Future Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT)
|1 G:(DE-HGF)POF3-520
|0 G:(DE-HGF)POF3-529H
|2 G:(DE-HGF)POF3-500
|v Addenda
|x 0
913 1 _ |a DE-HGF
|b Schlüsseltechnologien
|1 G:(DE-HGF)POF2-420
|0 G:(DE-HGF)POF2-424
|2 G:(DE-HGF)POF2-400
|v Exploratory materials and phenomena
|x 0
|4 G:(DE-HGF)POF
|3 G:(DE-HGF)POF2
|l Grundlagen zukünftiger Informationstechnologien
914 1 _ |y 2013
915 _ _ |a JCR/ISI refereed
|0 StatID:(DE-HGF)0010
|2 StatID
915 _ _ |a JCR
|0 StatID:(DE-HGF)0100
|2 StatID
915 _ _ |a WoS
|0 StatID:(DE-HGF)0110
|2 StatID
|b Science Citation Index
915 _ _ |a WoS
|0 StatID:(DE-HGF)0111
|2 StatID
|b Science Citation Index Expanded
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)0150
|2 StatID
|b Web of Science Core Collection
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)0199
|2 StatID
|b Thomson Reuters Master Journal List
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)0200
|2 StatID
|b SCOPUS
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)0300
|2 StatID
|b Medline
915 _ _ |a Nationallizenz
|0 StatID:(DE-HGF)0420
|2 StatID
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)1050
|2 StatID
|b BIOSIS Previews
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)1150
|2 StatID
|b Current Contents - Physical, Chemical and Earth Sciences
920 1 _ |0 I:(DE-Juel1)PGI-7-20110106
|k PGI-7
|l Elektronische Materialien
|x 0
980 _ _ |a journal
980 _ _ |a VDB
980 _ _ |a UNRESTRICTED
980 _ _ |a I:(DE-Juel1)PGI-7-20110106

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