%0 Journal Article
%A Blanquart, Timothee
%A Niinistö, Jaakko
%A Aslam, Nabeel
%A Banerjee, Manish
%A Tomczak, Yoann
%A Gavagnin, Marco
%A Longo, Valentino
%A Puukilainen, Esa
%A Wanzenboeck, H. D.
%A Kessels, W. M. M.
%A Devi, Anjana
%A Hoffmann-Eifert, Susanne
%A Ritala, Mikko
%A Leskelä, Markku
%T [Zr(NEtMe) 2 (guan-NEtMe) 2 ] as a Novel Atomic Layer Deposition Precursor: ZrO 2 Film Growth and Mechanistic Studies
%J Chemistry of materials
%V 25
%N 15
%@ 1520-5002
%C Washington, DC
%I American Chemical Society
%M FZJ-2014-00994
%P 3088 - 3095
%D 2013
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000323193000024
%R 10.1021/cm401279v
%U https://juser.fz-juelich.de/record/150961