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000150961 1001_ $$0P:(DE-HGF)0$$aBlanquart, Timothee$$b0$$eCorresponding author
000150961 245__ $$a[Zr(NEtMe) 2 (guan-NEtMe) 2 ] as a Novel Atomic Layer Deposition Precursor: ZrO 2 Film Growth and Mechanistic Studies
000150961 260__ $$aWashington, DC$$bAmerican Chemical Society$$c2013
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