TY  - JOUR
AU  - Blanquart, Timothee
AU  - Niinistö, Jaakko
AU  - Aslam, Nabeel
AU  - Banerjee, Manish
AU  - Tomczak, Yoann
AU  - Gavagnin, Marco
AU  - Longo, Valentino
AU  - Puukilainen, Esa
AU  - Wanzenboeck, H. D.
AU  - Kessels, W. M. M.
AU  - Devi, Anjana
AU  - Hoffmann-Eifert, Susanne
AU  - Ritala, Mikko
AU  - Leskelä, Markku
TI  - [Zr(NEtMe) 2 (guan-NEtMe) 2 ] as a Novel Atomic Layer Deposition Precursor: ZrO 2 Film Growth and Mechanistic Studies
JO  - Chemistry of materials
VL  - 25
IS  - 15
SN  - 1520-5002
CY  - Washington, DC
PB  - American Chemical Society
M1  - FZJ-2014-00994
SP  - 3088 - 3095
PY  - 2013
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000323193000024
DO  - DOI:10.1021/cm401279v
UR  - https://juser.fz-juelich.de/record/150961
ER  -