% IMPORTANT: The following is UTF-8 encoded.  This means that in the presence
% of non-ASCII characters, it will not work with BibTeX 0.99 or older.
% Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or
% “biber”.

@ARTICLE{Blanquart:150961,
      author       = {Blanquart, Timothee and Niinistö, Jaakko and Aslam, Nabeel
                      and Banerjee, Manish and Tomczak, Yoann and Gavagnin, Marco
                      and Longo, Valentino and Puukilainen, Esa and Wanzenboeck,
                      H. D. and Kessels, W. M. M. and Devi, Anjana and
                      Hoffmann-Eifert, Susanne and Ritala, Mikko and Leskelä,
                      Markku},
      title        = {[{Z}r({NE}t{M}e) 2 (guan-{NE}t{M}e) 2 ] as a {N}ovel
                      {A}tomic {L}ayer {D}eposition {P}recursor: {Z}r{O} 2 {F}ilm
                      {G}rowth and {M}echanistic {S}tudies},
      journal      = {Chemistry of materials},
      volume       = {25},
      number       = {15},
      issn         = {1520-5002},
      address      = {Washington, DC},
      publisher    = {American Chemical Society},
      reportid     = {FZJ-2014-00994},
      pages        = {3088 - 3095},
      year         = {2013},
      cin          = {PGI-7},
      ddc          = {540},
      cid          = {I:(DE-Juel1)PGI-7-20110106},
      pnm          = {424 - Exploratory materials and phenomena (POF2-424)},
      pid          = {G:(DE-HGF)POF2-424},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000323193000024},
      doi          = {10.1021/cm401279v},
      url          = {https://juser.fz-juelich.de/record/150961},
}