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| Home > Publications database > [Zr(NEtMe) 2 (guan-NEtMe) 2 ] as a Novel Atomic Layer Deposition Precursor: ZrO 2 Film Growth and Mechanistic Studies > print |
| Home > Publications database > [Zr(NEtMe) 2 (guan-NEtMe) 2 ] as a Novel Atomic Layer Deposition Precursor: ZrO 2 Film Growth and Mechanistic Studies > print |
| 001 | 150961 | ||
| 005 | 20210129213338.0 | ||
| 024 | 7 | _ | |a 10.1021/cm401279v |2 doi |
| 024 | 7 | _ | |a 0897-4756 |2 ISSN |
| 024 | 7 | _ | |a 1520-5002 |2 ISSN |
| 024 | 7 | _ | |a WOS:000323193000024 |2 WOS |
| 037 | _ | _ | |a FZJ-2014-00994 |
| 082 | _ | _ | |a 540 |
| 100 | 1 | _ | |a Blanquart, Timothee |0 P:(DE-HGF)0 |b 0 |e Corresponding author |
| 245 | _ | _ | |a [Zr(NEtMe) 2 (guan-NEtMe) 2 ] as a Novel Atomic Layer Deposition Precursor: ZrO 2 Film Growth and Mechanistic Studies |
| 260 | _ | _ | |a Washington, DC |c 2013 |b American Chemical Society |
| 336 | 7 | _ | |a Journal Article |b journal |m journal |0 PUB:(DE-HGF)16 |s 1391093186_27176 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a Output Types/Journal article |2 DataCite |
| 336 | 7 | _ | |a Journal Article |0 0 |2 EndNote |
| 336 | 7 | _ | |a ARTICLE |2 BibTeX |
| 336 | 7 | _ | |a JOURNAL_ARTICLE |2 ORCID |
| 336 | 7 | _ | |a article |2 DRIVER |
| 500 | _ | _ | |3 POF3_Assignment on 2016-02-29 |
| 536 | _ | _ | |a 424 - Exploratory materials and phenomena (POF2-424) |0 G:(DE-HGF)POF2-424 |c POF2-424 |x 0 |f POF II |
| 588 | _ | _ | |a Dataset connected to CrossRef, juser.fz-juelich.de |
| 700 | 1 | _ | |a Niinistö, Jaakko |0 P:(DE-HGF)0 |b 1 |
| 700 | 1 | _ | |a Aslam, Nabeel |0 P:(DE-Juel1)140489 |b 2 |u fzj |
| 700 | 1 | _ | |a Banerjee, Manish |0 P:(DE-HGF)0 |b 3 |
| 700 | 1 | _ | |a Tomczak, Yoann |0 P:(DE-HGF)0 |b 4 |
| 700 | 1 | _ | |a Gavagnin, Marco |0 P:(DE-HGF)0 |b 5 |
| 700 | 1 | _ | |a Longo, Valentino |0 P:(DE-HGF)0 |b 6 |
| 700 | 1 | _ | |a Puukilainen, Esa |0 P:(DE-HGF)0 |b 7 |
| 700 | 1 | _ | |a Wanzenboeck, H. D. |0 P:(DE-HGF)0 |b 8 |
| 700 | 1 | _ | |a Kessels, W. M. M. |0 P:(DE-HGF)0 |b 9 |
| 700 | 1 | _ | |a Devi, Anjana |0 P:(DE-HGF)0 |b 10 |
| 700 | 1 | _ | |a Hoffmann-Eifert, Susanne |0 P:(DE-Juel1)130717 |b 11 |u fzj |
| 700 | 1 | _ | |a Ritala, Mikko |0 P:(DE-HGF)0 |b 12 |
| 700 | 1 | _ | |a Leskelä, Markku |0 P:(DE-HGF)0 |b 13 |
| 773 | _ | _ | |a 10.1021/cm401279v |g Vol. 25, no. 15, p. 3088 - 3095 |p 3088 - 3095 |n 15 |0 PERI:(DE-600)1500399-1 |t Chemistry of materials |v 25 |y 2013 |x 1520-5002 |
| 856 | 4 | _ | |u https://juser.fz-juelich.de/record/150961/files/FZJ-2014-00994.pdf |z Published final document. |y Restricted |
| 909 | C | O | |o oai:juser.fz-juelich.de:150961 |p VDB |
| 910 | 1 | _ | |a Forschungszentrum Jülich GmbH |0 I:(DE-588b)5008462-8 |k FZJ |b 2 |6 P:(DE-Juel1)140489 |
| 910 | 1 | _ | |a Forschungszentrum Jülich GmbH |0 I:(DE-588b)5008462-8 |k FZJ |b 11 |6 P:(DE-Juel1)130717 |
| 913 | 2 | _ | |a DE-HGF |b Key Technologies |l Future Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT) |1 G:(DE-HGF)POF3-520 |0 G:(DE-HGF)POF3-529H |2 G:(DE-HGF)POF3-500 |v Addenda |x 0 |
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| 914 | 1 | _ | |y 2013 |
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| 920 | 1 | _ | |0 I:(DE-Juel1)PGI-7-20110106 |k PGI-7 |l Elektronische Materialien |x 0 |
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| 980 | _ | _ | |a UNRESTRICTED |
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