Home > Publications database > [Zr(NEtMe) 2 (guan-NEtMe) 2 ] as a Novel Atomic Layer Deposition Precursor: ZrO 2 Film Growth and Mechanistic Studies > Access to Fulltext
 
 
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    FZJ-2014-00994.pdf [2.58 MB] 17 Mar 2014, 15:33 Restricted
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