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@MASTERSTHESIS{Romanczyk:151308,
author = {Romanczyk, Peter},
title = {{C}harakterisierung von {A}luminium- und
{S}eltenerd-dotierten {H}f{O}2 high-k / {M}etall
{G}atestacks},
school = {RWTH Aachen},
type = {MS},
reportid = {FZJ-2014-01287},
pages = {63},
year = {2014},
note = {RWTH Aachen, Masterarbeit, 2013},
keywords = {Unveröffentlichte Hochschulschrift (GND)},
cin = {PGI-9 / JARA-FIT},
cid = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
pnm = {421 - Frontiers of charge based Electronics (POF2-421)},
pid = {G:(DE-HGF)POF2-421},
typ = {PUB:(DE-HGF)19},
url = {https://juser.fz-juelich.de/record/151308},
}