Master Thesis

FZJ-2014-01287

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Charakterisierung von Aluminium- und Seltenerd-dotierten HfO2 high-k / Metall Gatestacks

Romanczyk, P. (Corresponding author)FZJ*

2014

Keyword(s): Unveröffentlichte Hochschulschrift

Note: RWTH Aachen, Masterarbeit, 2013

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Contributing Institute(s):

1. Halbleiter-Nanoelektronik (PGI-9)
2. JARA-FIT (JARA-FIT)

Research Program(s):

1. 421 - Frontiers of charge based Electronics (POF2-421) (POF2-421)

Appears in the scientific report 2014

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