%0 Conference Paper
%A Nichau, A.
%A Durgun Özben, E.
%A Schnee, M.
%A Lopes, J.M.J.
%A Besmehn, A.
%A Luysberg, M.
%A Knoll, L.
%A Habicht, S.
%A Mussmann, V.
%A Luptak, R.
%A Lenk, St.
%A Rubio-Zuazo, J.
%A Castro, G.R.
%A Buca, D.
%A Zhao, Q.T.
%A Schubert, J.
%A Mantl, S.
%T Lanthanum Lutetium oxide integration in a gate-first process on SOI MOSFETs
%M PreJuSER-15167
%D 2011
%Z Record converted from VDB: 12.11.2012
%< IEEE Proceeding of 12th International Conference on Ultimate Integration on Silicon (ULIS), Cork, Ireland, 14-16 March 2011. - S. 167 - 170
%F PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
%9 Contribution to a conference proceedingsContribution to a book
%U https://juser.fz-juelich.de/record/15167