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@INPROCEEDINGS{Nichau:15167,
      author       = {Nichau, A. and Durgun Özben, E. and Schnee, M. and Lopes,
                      J.M.J. and Besmehn, A. and Luysberg, M. and Knoll, L. and
                      Habicht, S. and Mussmann, V. and Luptak, R. and Lenk, St.
                      and Rubio-Zuazo, J. and Castro, G.R. and Buca, D. and Zhao,
                      Q.T. and Schubert, J. and Mantl, S.},
      title        = {{L}anthanum {L}utetium oxide integration in a gate-first
                      process on {SOI} {MOSFET}s},
      reportid     = {PreJuSER-15167},
      year         = {2011},
      note         = {Record converted from VDB: 12.11.2012},
      comment      = {IEEE Proceeding of 12th International Conference on
                      Ultimate Integration on Silicon (ULIS), Cork, Ireland, 14-16
                      March 2011. - S. 167 - 170},
      booktitle     = {IEEE Proceeding of 12th International
                       Conference on Ultimate Integration on
                       Silicon (ULIS), Cork, Ireland, 14-16
                       March 2011. - S. 167 - 170},
      cin          = {PGI-9 / PGI-5 / JARA-FIT / ZCH},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / I:(DE-Juel1)PGI-5-20110106 /
                      $I:(DE-82)080009_20140620$ / I:(DE-Juel1)ZCH-20090406},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      typ          = {PUB:(DE-HGF)8 / PUB:(DE-HGF)7},
      url          = {https://juser.fz-juelich.de/record/15167},
}