TY - CONF AU - Fox, A. AU - Mikulics, M. AU - Winden, A. AU - Hardtdegen, H. AU - Gregusova, D. AU - Adam, Roman AU - Sobolewski, R. AU - Marso, M. AU - Grutzmacher, D. AU - Kordos, P. TI - Towards future III-nitride based THz OEICs in the UV range PB - IEEE M1 - FZJ-2014-02938 SP - 191,194 PY - 2012 AB - A group III-nitride based MSM photodetector integrated with a MESFET in an OEIC circuit is presented exhibiting an exceptionally high 3 dB-bandwidth of 410 GHz. Advances towards circuit improvement by the future implementation of a gate recessed AlGaN/GaN HEMT device are reported. μ-PL is used directly on the processed device to optimize processing with respect to processing related strain and damage effects. It is demonstrated that μ-PL allows insight into device and material optimization which are the strategic key to improved future III-nitride based UV-optoelectronic integrated circuits (OEIC) operated up to the THz range. © 2012 IEEE. T2 - 2012 International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM) CY - 11 Nov 2012 - 15 Nov 2012, Smolenice (Slovakia) Y2 - 11 Nov 2012 - 15 Nov 2012 M2 - Smolenice, Slovakia LB - PUB:(DE-HGF)8 ; PUB:(DE-HGF)7 DO - DOI:10.1109/ASDAM.2012.6418570 UR - https://juser.fz-juelich.de/record/153295 ER -