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@ARTICLE{Schfer:153304,
      author       = {Schäfer, A. and Besmehn, A. and Luysberg, M. and Winden,
                      A. and Stoica, T. and Schnee, M. and Zander, W. and Niu, G.
                      and Schroeder, T. and Mantl, S. and Hardtdegen, H. and
                      Mikulics, M. and Schubert, J.},
      title        = {{H}exagonal {G}d{S}c{O} 3 : an epitaxial high-κ dielectric
                      for {G}a{N}},
      journal      = {Semiconductor science and technology},
      volume       = {29},
      number       = {7},
      issn         = {1361-6641},
      address      = {Bristol},
      publisher    = {IOP Publ.},
      reportid     = {FZJ-2014-02947},
      pages        = {075005},
      year         = {2014},
      abstract     = {GdScO3 was deposited by pulsed laser deposition on two
                      different templates suitable for III-Ngrowth: metalorganic
                      vapour phase epitaxial GaN (0 0 0 1) on sapphire and
                      molecular beamepitaxial Y2O3 on Si (1 1 1). The structure
                      and crystallinity of the layers were determined aswell as
                      the band gap and permittivity of the material. It was found
                      that GdScO3 growsepitaxially and crystallizes hexagonally in
                      contrast to the usually found orthorhombic oramorphous
                      phases. A band gap and permittivity κ of 5.2 eV and 24 were
                      found, respectively,making GdScO3 a promising epitaxial gate
                      dielectric for III-N transistor applications.},
      cin          = {PGI-9 / ZEA-3 / PGI-5 / PGI-6 / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / I:(DE-Juel1)ZEA-3-20090406 /
                      I:(DE-Juel1)PGI-5-20110106 / I:(DE-Juel1)PGI-6-20110106 /
                      $I:(DE-82)080009_20140620$},
      pnm          = {421 - Frontiers of charge based Electronics (POF2-421)},
      pid          = {G:(DE-HGF)POF2-421},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000337356600006},
      doi          = {10.1088/0268-1242/29/7/075005},
      url          = {https://juser.fz-juelich.de/record/153304},
}