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@ARTICLE{Huck:155448,
author = {Huck, Christina and Poghossian, Arshak and Kerroumi, Iman
and Schusser, Sebastian and Bäcker, Matthias and Zander,
Willi and Schubert, Jürgen and Buniatyan, Vahe V. and
Martirosyan, Norayr W. and Wagner, Patrick and Schöning,
Michael J.},
title = {{M}ultiparameter {S}ensor {C}hip with {B}arium {S}trontium
{T}itanate as {M}ultipurpose {M}aterial},
journal = {Electroanalysis},
volume = {26},
number = {5},
issn = {1040-0397},
address = {Weinheim},
publisher = {Wiley-VCH-Verl.},
reportid = {FZJ-2014-04614},
pages = {980 - 987},
year = {2014},
abstract = {It is well known that biochemical and biotechnological
processes are strongly dependent and affected by a variety
of physico-chemical parameters such as pH value,
temperature, pressure and electrolyte conductivity.
Therefore, these quantities have to be monitored or
controlled in order to guarantee a stable process operation,
optimization and high yield. In this work, a sensor chip for
the multiparameter detection of three physico-chemical
parameters such as electrolyte conductivity, pH and
temperature is realized using barium strontium titanate
(BST) as multipurpose material. The chip integrates a
capacitively coupled four-electrode electrolyte-conductivity
sensor, a capacitive field-effect pH sensor and a thin-film
Pt-temperature sensor. Due to the multifunctional properties
of BST, it is utilized as final outermost coating layer of
the processed sensor chip and serves as passivation and
protection layer as well as pH-sensitive transducer material
at the same time. The results of testing of the individual
sensors of the developed multiparameter sensor chip are
presented. In addition, a quasi-simultaneous multiparameter
characterization of the sensor chip in buffer solutions with
different pH value and electrolyte conductivity is
performed. To study the sensor behavior and the suitability
of BST as multifunctional material under harsh environmental
conditions, the sensor chip was exemplarily tested in a
biogas digestate.},
cin = {PGI-8 / JARA-FIT / ICS-8},
ddc = {540},
cid = {I:(DE-Juel1)PGI-8-20110106 / $I:(DE-82)080009_20140620$ /
I:(DE-Juel1)ICS-8-20110106},
pnm = {423 - Sensorics and bioinspired systems (POF2-423)},
pid = {G:(DE-HGF)POF2-423},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000335997600012},
doi = {10.1002/elan.201400076},
url = {https://juser.fz-juelich.de/record/155448},
}