Journal Article

FZJ-2014-04614

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Multiparameter Sensor Chip with Barium Strontium Titanate as Multipurpose Material

Huck, C. (Corresponding Author)FZJ* ; Poghossian, A.FZJ* ; Kerroumi, I. ; Schusser, S.FZJ* ; Bäcker, M.FZJ* ; Zander, W.FZJ* ; Schubert, J.FZJ* ; Buniatyan, V. V. ; Martirosyan, N. W. ; Wagner, P. ; Schöning, M. J.FZJ*

2014
Wiley-VCH-Verl. Weinheim

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Please use a persistent id in citations: doi:10.1002/elan.201400076

Abstract: It is well known that biochemical and biotechnological processes are strongly dependent and affected by a variety of physico-chemical parameters such as pH value, temperature, pressure and electrolyte conductivity. Therefore, these quantities have to be monitored or controlled in order to guarantee a stable process operation, optimization and high yield. In this work, a sensor chip for the multiparameter detection of three physico-chemical parameters such as electrolyte conductivity, pH and temperature is realized using barium strontium titanate (BST) as multipurpose material. The chip integrates a capacitively coupled four-electrode electrolyte-conductivity sensor, a capacitive field-effect pH sensor and a thin-film Pt-temperature sensor. Due to the multifunctional properties of BST, it is utilized as final outermost coating layer of the processed sensor chip and serves as passivation and protection layer as well as pH-sensitive transducer material at the same time. The results of testing of the individual sensors of the developed multiparameter sensor chip are presented. In addition, a quasi-simultaneous multiparameter characterization of the sensor chip in buffer solutions with different pH value and electrolyte conductivity is performed. To study the sensor behavior and the suitability of BST as multifunctional material under harsh environmental conditions, the sensor chip was exemplarily tested in a biogas digestate.

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Contributing Institute(s):

1. Bioelektronik (PGI-8)
2. JARA-FIT (JARA-FIT)
3. Bioelektronik (ICS-8)

Research Program(s):

1. 423 - Sensorics and bioinspired systems (POF2-423) (POF2-423)

Appears in the scientific report 2014

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Database coverage:
; BIOSIS Previews ; Current Contents - Physical, Chemical and Earth Sciences ; JCR ; Nationallizenz ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

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