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@ARTICLE{Yang:17056,
author = {Yang, S. and Huang, S. and Chen, H. and Schnee, M. and
Zhao, Q.T. and Schubert, J. and Chen, K.J.},
title = {{C}haracterization of high- {L}a{L}u{O}3 thin film grown on
{A}l{G}a{N}/{G}a{N} heterostructure by molecular beam
deposition},
journal = {Applied physics letters},
volume = {99},
issn = {0003-6951},
address = {Melville, NY},
publisher = {American Institute of Physics},
reportid = {PreJuSER-17056},
pages = {182103},
year = {2011},
note = {This work is supported by Hong Kong Research Grant Council
under 611610. The authors also thank Mr. J.J. Gu and
Professor P.D. Ye from Purdue University for valuable
information about LLO thin film.},
abstract = {We report the study of high-dielectric-constant
(high-kappa) dielectric LaLuO3 (LLO) thin film that is grown
on AlGaN/GaN heterostructure by molecular beam deposition
(MBD). The physical properties of LLO on AlGaN/GaN
heterostrucure have been investigated with atomic force
microscopy, x-ray photoelectron spectroscopy, and TEM. It is
revealed that the MBD-grown 16 nm-thick LLO film is
polycrystalline with a thin (similar to 2 nm) amorphous
transition layer at the LLO/GaN interface. The bandgap of
LLO is derived as 5.3 +/- 0.04 eV from O1s energy loss
spectrum. Capacitance-voltage (C-V) characteristics of a
Ni-Au/LLO/III-nitride metal-insulator-semiconductor diode
exhibit small frequency dispersion $(<2\%)$ and reveal a
high effective dielectric constant of similar to 28 for the
LLO film. The LLO layer is shown to be effective in
suppressing the reverse and forward leakage current in the
MIS diode. In particular, the MIS diode forward current is
reduced by 7 orders of magnitude at a forward bias of 1V
compared to a conventional Ni-Au/III-nitride Schottky diode.
(C) 2011 American Institute of Physics. [doi:
10.1063/1.3657521]},
keywords = {J (WoSType)},
cin = {JARA-FIT / PGI-9},
ddc = {530},
cid = {$I:(DE-82)080009_20140620$ / I:(DE-Juel1)PGI-9-20110106},
pnm = {Grundlagen für zukünftige Informationstechnologien},
pid = {G:(DE-Juel1)FUEK412},
shelfmark = {Physics, Applied},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000296659400045},
doi = {10.1063/1.3657521},
url = {https://juser.fz-juelich.de/record/17056},
}