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@ARTICLE{Michard:172016,
      author       = {Michard, S. and Meier, Matthias and Zastrow, U. and
                      Astakhov, O. and Finger, F.},
      title        = {{I}nvestigation of porosity and atmospheric gas diffusion
                      in microcrystalline silicon fabricated at high growth rates},
      journal      = {Canadian journal of physics},
      volume       = {92},
      number       = {7/8},
      issn         = {1208-6045},
      address      = {Ottawa, Ontario},
      publisher    = {NRC Research Press},
      reportid     = {FZJ-2014-05565},
      pages        = {774 - 777},
      year         = {2014},
      abstract     = {The effects of postdeposition air exposure of
                      microcrystalline silicon films, prepared at varied
                      deposition rates, are investigated. The changes in the
                      oxygen content, evaluated from Fourier transform infrared
                      spectroscopy measurements, were studied over a period of
                      time after deposition (up to 180 days) depending on
                      deposition rate and Raman intensity ratio. Two types of
                      behavior were identified: in the case of highly crystalline
                      samples, an oxygen uptake increases with increasing Raman
                      intensity ratio; while less crystalline samples were found
                      to be more stable against oxygen incorporation. These
                      observations are related to the film microstructure and
                      porosity and are linked to the variations in Raman intensity
                      ratio and growth rate of microcrystalline silicon films.},
      cin          = {IEK-5},
      ddc          = {530},
      cid          = {I:(DE-Juel1)IEK-5-20101013},
      pnm          = {111 - Thin Film Photovoltaics (POF2-111)},
      pid          = {G:(DE-HGF)POF2-111},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000339379500049},
      doi          = {10.1139/cjp-2013-0636},
      url          = {https://juser.fz-juelich.de/record/172016},
}