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| Home > Publications database > Investigation of porosity and atmospheric gas diffusion in microcrystalline silicon fabricated at high growth rates > print |
| 001 | 172016 | ||
| 005 | 20240708133747.0 | ||
| 024 | 7 | _ | |a 10.1139/cjp-2013-0636 |2 doi |
| 024 | 7 | _ | |a 0008-4204 |2 ISSN |
| 024 | 7 | _ | |a 1208-6045 |2 ISSN |
| 024 | 7 | _ | |a WOS:000339379500049 |2 WOS |
| 024 | 7 | _ | |a altmetric:2069633 |2 altmetric |
| 037 | _ | _ | |a FZJ-2014-05565 |
| 041 | _ | _ | |a English |
| 082 | _ | _ | |a 530 |
| 100 | 1 | _ | |a Michard, S. |0 P:(DE-Juel1)141652 |b 0 |
| 245 | _ | _ | |a Investigation of porosity and atmospheric gas diffusion in microcrystalline silicon fabricated at high growth rates |
| 260 | _ | _ | |a Ottawa, Ontario |c 2014 |b NRC Research Press |
| 336 | 7 | _ | |a Journal Article |b journal |m journal |0 PUB:(DE-HGF)16 |s 1415171717_23051 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a Output Types/Journal article |2 DataCite |
| 336 | 7 | _ | |a Journal Article |0 0 |2 EndNote |
| 336 | 7 | _ | |a ARTICLE |2 BibTeX |
| 336 | 7 | _ | |a JOURNAL_ARTICLE |2 ORCID |
| 336 | 7 | _ | |a article |2 DRIVER |
| 520 | _ | _ | |a The effects of postdeposition air exposure of microcrystalline silicon films, prepared at varied deposition rates, are investigated. The changes in the oxygen content, evaluated from Fourier transform infrared spectroscopy measurements, were studied over a period of time after deposition (up to 180 days) depending on deposition rate and Raman intensity ratio. Two types of behavior were identified: in the case of highly crystalline samples, an oxygen uptake increases with increasing Raman intensity ratio; while less crystalline samples were found to be more stable against oxygen incorporation. These observations are related to the film microstructure and porosity and are linked to the variations in Raman intensity ratio and growth rate of microcrystalline silicon films. |
| 536 | _ | _ | |a 111 - Thin Film Photovoltaics (POF2-111) |0 G:(DE-HGF)POF2-111 |c POF2-111 |f POF II |x 0 |
| 588 | _ | _ | |a Dataset connected to CrossRef, juser.fz-juelich.de |
| 700 | 1 | _ | |a Meier, Matthias |0 P:(DE-Juel1)130830 |b 1 |e Corresponding Author |
| 700 | 1 | _ | |a Zastrow, U. |0 P:(DE-Juel1)130309 |b 2 |
| 700 | 1 | _ | |a Astakhov, O. |0 P:(DE-Juel1)130212 |b 3 |
| 700 | 1 | _ | |a Finger, F. |0 P:(DE-Juel1)130238 |b 4 |
| 773 | _ | _ | |a 10.1139/cjp-2013-0636 |g Vol. 92, no. 7/8, p. 774 - 777 |0 PERI:(DE-600)2021497-2 |n 7/8 |p 774 - 777 |t Canadian journal of physics |v 92 |y 2014 |x 1208-6045 |
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| 913 | 2 | _ | |a DE-HGF |b POF III |l Forschungsbereich Energie |1 G:(DE-HGF)POF3-120 |0 G:(DE-HGF)POF3-121 |2 G:(DE-HGF)POF3-100 |v Erneuerbare Energien |x 0 |
| 913 | 1 | _ | |a DE-HGF |b Energie |l Erneuerbare Energien |1 G:(DE-HGF)POF2-110 |0 G:(DE-HGF)POF2-111 |2 G:(DE-HGF)POF2-100 |v Thin Film Photovoltaics |x 0 |4 G:(DE-HGF)POF |3 G:(DE-HGF)POF2 |
| 914 | 1 | _ | |y 2014 |
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