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@ARTICLE{Schfer:185884,
      author       = {Schäfer, Anna and Wendt, Fabian and Mantl, Siegfried and
                      Hardtdegen, Hilde and Mikulics, Martin and Schubert, Jürgen
                      and Luysberg, Martina and Besmehn, Astrid and Niu, Gang and
                      Schroeder, Thomas},
      title        = {{H}exagonal {L}a{L}u{O}3 as high-κ dielectric},
      journal      = {Journal of vacuum science $\&$ technology / B},
      volume       = {33},
      number       = {1},
      issn         = {2166-2754},
      address      = {New York, NY},
      publisher    = {Inst.},
      reportid     = {FZJ-2015-00021},
      pages        = {01A104},
      year         = {2015},
      abstract     = {Among the different polymorphs of LaLuO3 the hexagonal one
                      is the least explored. Therefore, in this work, hexagonal
                      LaLuO3 is grown and investigated in more detail. Two
                      different growth templates are presented, offering the
                      possibility to stabilize this hexagonal phase: Y2O3 on Si
                      (111) and GaN on Al2O3 (0001). The LaLuO3 layers show smooth
                      surfaces and high crystallinity for both types of templates.
                      Spectroscopic characterization reveals a wide bandgap Eg of
                      5.6 eV and capacitance voltage measurements display a
                      relative permittivity κ of 26, which makes hexagonal LaLuO3
                      a promising candidate as a future gate dielectric for
                      devices based on hexagonal semiconductors such as GaN.},
      cin          = {PGI-9 / PGI-5 / ZEA-3 / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / I:(DE-Juel1)PGI-5-20110106 /
                      I:(DE-Juel1)ZEA-3-20090406 / $I:(DE-82)080009_20140620$},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000348915500004},
      doi          = {10.1116/1.4904401},
      url          = {https://juser.fz-juelich.de/record/185884},
}