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@ARTICLE{Singh:186622,
author = {Singh, Trilok and Wang, Shuangzhou and Aslam, Nabeel and
Zhang, Hehe and Hoffmann-Eifert, Susanne and Mathur, Sanjay},
title = {{A}tomic {L}ayer {D}eposition of {T}ransparent {VO} $_{x}$
{T}hin {F}ilms for {R}esistive {S}witching {A}pplications},
journal = {Chemical vapor deposition},
volume = {20},
number = {7-8-9},
issn = {0948-1907},
address = {Weinheim},
publisher = {Wiley-VCH},
reportid = {FZJ-2015-00695},
pages = {291 - 297},
year = {2014},
abstract = {Atomic layer deposition (ALD) offers nearly pinhole-free,
conformal, and with good thickness control, metal oxide
nanometric thin films required for next-generation memory
devices. Here we report on the ALD of VOx thin films grown
at about 100°C from a vanadium tri-isopropoxide (VTIP)
precursor, with water as the co-reactant, followed by their
post-growth treatments, for potential applications in
resistive switching (RS) devices. As-grown VOx films are
amorphous, and transform into polycrystalline layers upon
annealing. Capacitor structures fabricated from amorphous
VOx films show current-voltage (I-V) characteristics,
interesting for RS applications. Depending on the
electroforming conditions, bipolar-type memory switching
with a resistance ratio ROFF/RON > 103 is obtained, as
well as a combination of memory and threshold switching. The
latter is attractive for its highly non-linear I-V
characteristics, which is attributed to the
temperature-induced insulator-to-metal transition (IMT) in
vanadium dioxide.},
cin = {PGI-7},
ddc = {540},
cid = {I:(DE-Juel1)PGI-7-20110106},
pnm = {424 - Exploratory materials and phenomena (POF2-424)},
pid = {G:(DE-HGF)POF2-424},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000342069800013},
doi = {10.1002/cvde.201407122},
url = {https://juser.fz-juelich.de/record/186622},
}