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@ARTICLE{Kovacs:187202,
author = {Kovacs, Andras and Duchamp, Martial and Dunin-Borkowski,
Rafal and Yakimova, Rositza and Neumann, Peter L. and
Behmenburg, Hannes and Foltynski, Bartozs and Giesen,
Christoph and Heuken, Michael and Pecz, Bela},
title = {{G}raphoepitaxy of {H}igh-{Q}uality {G}a{N} {L}ayers on
{G}raphene/6{H}-{S}i{C}},
journal = {Advanced materials interfaces},
volume = {2},
number = {2},
issn = {2196-7350},
address = {Weinheim},
publisher = {Wiley-VCH},
reportid = {FZJ-2015-00876},
pages = {1400230},
year = {2015},
abstract = {The implementation of graphene layers in gallium nitride
(GaN) heterostructure growth can solve self-heating problems
in nitride-based high-power electronic and light-emitting
optoelectronic devices. In the present study, high-quality
GaN layers are grown on patterned graphene layers and
6H–SiC by metalorganic chemical vapor deposition. A
periodic pattern of graphene layers is fabricated on
6H–SiC by using polymethyl methacrylate deposition and
electron beam lithography, followed by etching using an
Ar/O2 gas atmosphere. Prior to GaN growth, an AlN buffer
layer and an Al0.2Ga0.8N transition layer are deposited. The
atomic structures of the interfaces between the 6H–SiC and
graphene, as well as between the graphene and AlN, are
studied using scanning transmission electron microscopy.
Phase separation of the Al0.2Ga0.8N transition layer into an
AlN and GaN superlattice is observed. Above the continuous
graphene layers, polycrystalline defective GaN is rapidly
overgrown by better quality single-crystalline GaN from the
etched regions. The lateral overgrowth of GaN results in the
presence of a low density of dislocations (≈109 cm−2)
and inversion domains and the formation of a smooth GaN
surface},
cin = {PGI-5},
ddc = {540},
cid = {I:(DE-Juel1)PGI-5-20110106},
pnm = {143 - Controlling Configuration-Based Phenomena (POF3-143)},
pid = {G:(DE-HGF)POF3-143},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000348287700002},
doi = {10.1002/admi.201400230},
url = {https://juser.fz-juelich.de/record/187202},
}