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000001880 084__ $$2WoS$$aPhysics, Applied
000001880 1001_ $$0P:(DE-Juel1)VDB75722$$aShen, W.$$b0$$uFZJ
000001880 245__ $$aImproved endurance behavior of resistive switching in (Ba,Sr)TiO3 thin films with W top electrode
000001880 260__ $$aMelville, NY$$bAmerican Institute of Physics$$c2008
000001880 300__ $$a222102-1
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000001880 440_0 $$0562$$aApplied Physics Letters$$v93$$x0003-6951$$y22
000001880 500__ $$aWe thank Tobias Menke for helpful discussions and the critical reading of the manuscript. This work was financially supported by Intel, Inc., Santa Clara.
000001880 520__ $$aWe compared the resistive switching performance of barium strontium titanate (BST) thin films with tungsten (W) and platinum (Pt) top electrodes, respectively. The yield, endurance, and reliability were strongly improved for the samples with W top electrode. Whereas the samples with Pt top electrode show a fast drop in the resistance for both high and low resistance states, the devices with W top electrode can be switched for 10(4) times without any obvious degradation. We attribute the improved switching performance to a reversible oxidation and reduction in a WOx layer at the W-BST interface, which was detected by time-of-flight secondary-ion-mass spectroscopy measurements.
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000001880 65320 $$2Author$$abarium compounds
000001880 65320 $$2Author$$aelectrical conductivity transitions
000001880 65320 $$2Author$$aelectrical resistivity
000001880 65320 $$2Author$$aelectrodes
000001880 65320 $$2Author$$aferroelectric semiconductors
000001880 65320 $$2Author$$aoxidation
000001880 65320 $$2Author$$aplatinum
000001880 65320 $$2Author$$areduction (chemical)
000001880 65320 $$2Author$$asecondary ion mass spectra
000001880 65320 $$2Author$$asemiconductor materials
000001880 65320 $$2Author$$asemiconductor thin films
000001880 65320 $$2Author$$asemiconductor-metal boundaries
000001880 65320 $$2Author$$astrontium compounds
000001880 65320 $$2Author$$atime of flight mass spectra
000001880 65320 $$2Author$$atungsten
000001880 7001_ $$0P:(DE-Juel1)VDB5464$$aDittmann, R.$$b1$$uFZJ
000001880 7001_ $$0P:(DE-Juel1)VDB2782$$aBreuer, U.$$b2$$uFZJ
000001880 7001_ $$0P:(DE-Juel1)131022$$aWaser, R.$$b3$$uFZJ
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