TY  - JOUR
AU  - Shen, W.
AU  - Dittmann, R.
AU  - Breuer, U.
AU  - Waser, R.
TI  - Improved endurance behavior of resistive switching in (Ba,Sr)TiO3 thin films with W top electrode
JO  - Applied physics letters
VL  - 93
SN  - 0003-6951
CY  - Melville, NY
PB  - American Institute of Physics
M1  - PreJuSER-1880
SP  - 222102-1
PY  - 2008
N1  - We thank Tobias Menke for helpful discussions and the critical reading of the manuscript. This work was financially supported by Intel, Inc., Santa Clara.
AB  - We compared the resistive switching performance of barium strontium titanate (BST) thin films with tungsten (W) and platinum (Pt) top electrodes, respectively. The yield, endurance, and reliability were strongly improved for the samples with W top electrode. Whereas the samples with Pt top electrode show a fast drop in the resistance for both high and low resistance states, the devices with W top electrode can be switched for 10(4) times without any obvious degradation. We attribute the improved switching performance to a reversible oxidation and reduction in a WOx layer at the W-BST interface, which was detected by time-of-flight secondary-ion-mass spectroscopy measurements.
KW  - J (WoSType)
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000261430600034
DO  - DOI:10.1063/1.3039809
UR  - https://juser.fz-juelich.de/record/1880
ER  -