001     1880
005     20200423202410.0
024 7 _ |a 10.1063/1.3039809
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037 _ _ |a PreJuSER-1880
041 _ _ |a eng
082 _ _ |a 530
084 _ _ |2 WoS
|a Physics, Applied
100 1 _ |a Shen, W.
|b 0
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245 _ _ |a Improved endurance behavior of resistive switching in (Ba,Sr)TiO3 thin films with W top electrode
260 _ _ |a Melville, NY
|b American Institute of Physics
|c 2008
300 _ _ |a 222102-1
336 7 _ |a Journal Article
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440 _ 0 |a Applied Physics Letters
|x 0003-6951
|0 562
|y 22
|v 93
500 _ _ |a We thank Tobias Menke for helpful discussions and the critical reading of the manuscript. This work was financially supported by Intel, Inc., Santa Clara.
520 _ _ |a We compared the resistive switching performance of barium strontium titanate (BST) thin films with tungsten (W) and platinum (Pt) top electrodes, respectively. The yield, endurance, and reliability were strongly improved for the samples with W top electrode. Whereas the samples with Pt top electrode show a fast drop in the resistance for both high and low resistance states, the devices with W top electrode can be switched for 10(4) times without any obvious degradation. We attribute the improved switching performance to a reversible oxidation and reduction in a WOx layer at the W-BST interface, which was detected by time-of-flight secondary-ion-mass spectroscopy measurements.
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653 2 0 |2 Author
|a barium compounds
653 2 0 |2 Author
|a electrical conductivity transitions
653 2 0 |2 Author
|a electrical resistivity
653 2 0 |2 Author
|a electrodes
653 2 0 |2 Author
|a ferroelectric semiconductors
653 2 0 |2 Author
|a oxidation
653 2 0 |2 Author
|a platinum
653 2 0 |2 Author
|a reduction (chemical)
653 2 0 |2 Author
|a secondary ion mass spectra
653 2 0 |2 Author
|a semiconductor materials
653 2 0 |2 Author
|a semiconductor thin films
653 2 0 |2 Author
|a semiconductor-metal boundaries
653 2 0 |2 Author
|a strontium compounds
653 2 0 |2 Author
|a time of flight mass spectra
653 2 0 |2 Author
|a tungsten
700 1 _ |a Dittmann, R.
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700 1 _ |a Breuer, U.
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700 1 _ |a Waser, R.
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773 _ _ |a 10.1063/1.3039809
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|0 PERI:(DE-600)1469436-0
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|v 93
|y 2008
|x 0003-6951
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